CAE Software【Femtet】Murata Software Co., Ltd.
Example22 Magnetic Field around Cathode
General
-
Magnetic field around the cathode of a sputtering machine is analyzed.
-
The vectors of the magnetic field and the magnetic flux density are solved.
-
Unless specified in the list below, the default conditions will be applied.
Analysis Space
|
Item |
Settings |
|
Analysis Space |
3D |
|
Model unit |
mm |
Analysis Conditions
|
Item |
Settings |
|
Solvers |
Magnetic Field Analysis [Gauss] |
|
Analysis Type |
Static analysis |
|
Options |
N/A |
Model
A yoke and multiple magnets are defined.
As the model is symmetric, a one-fourth part is analyzed.
Body Attributes and Materials
|
Body Number/Type |
Body Attribute Name |
Material Name |
|
22/Solid |
Yoke |
Yoke |
|
9/Solid |
MagOut |
Mag |
|
10/Solid |
MagOut |
Mag |
|
11/Solid |
MagOut |
Mag |
|
17/Solid |
MagOut |
Mag |
|
18/Solid |
MagOut |
Mag |
|
19/Solid |
MagOut |
Mag |
|
21/Solid |
MagCenter |
Mag |
* Available from the Material DB
The material properties are set up as follows:
|
Material Name |
Tab |
Properties |
|
Mag |
Permeability |
Material Type: Permanent Magnet |
|
Magnet |
Magnetization Strength: 1.0 |
The material properties are set up as follows:
|
Body Attribute Name |
Tab |
Settings |
|
MagOut |
Direction |
Vector: X=0.0, Y=0.0, Z=-1.0 |
|
MagCenter |
Direction |
Vector: X=0.0, Y=0.0, Z=1.0 |
Boundary Conditions
The model is 1/4 symmetric. Symmetric boundary is applied to two faces of symmetry.
|
Boundary Condition Name/Topology |
Tab |
Boundary Condition Type |
Setting |
|
Sym1/Face |
Symmetry/Continuity |
Face of symmetry |
|
|
Sym2/Face |
Symmetry/Continuity |
Face of symmetry |
|
Results
The vectors of the magnetic flux density are shown below.
The magnetic flux originated from the magnet placed in the peripheral flows in to the center.
The vectors of the magnetic field are shown below.
