Magnetic Field around Cathodeexamples|products|Murata Software Co., Ltd.

Example22 Magnetic Field around Cathode

General

  • Magnetic field around the cathode of a sputtering machine is analyzed.
     

  • The vectors of the magnetic field and the magnetic flux density are solved.
     

  • Unless specified in the list below, the default conditions will be applied.
     

 

Analysis Space

Item

Settings

Analysis Space

3D

Model unit

mm

 

Analysis Conditions

Item

Settings

Solvers

Magnetic Field Analysis [Gauss]

Analysis Type

Static analysis

Options

N/A

Model

A yoke and multiple magnets are defined.

As the model is symmetric, a one-fourth part is analyzed.


 

Body Attributes and Materials

Body Number/Type

Body Attribute Name

Material Name

22/Solid

Yoke

Yoke

9/Solid

MagOut

Mag

10/Solid

MagOut

Mag

11/Solid

MagOut

Mag

17/Solid

MagOut

Mag

18/Solid

MagOut

Mag

19/Solid

MagOut

Mag

21/Solid

MagCenter

Mag

* Available from the Material DB

 

The material properties are set up as follows:

Material Name

Tab

Properties

Mag

Permeability

Material Type: Permanent Magnet

Magnet

Magnetization Strength: 1.0

 

The material properties are set up as follows:

Body Attribute Name

Tab

Settings

MagOut

Direction

Vector: X=0.0, Y=0.0, Z=-1.0

MagCenter

Direction

Vector: X=0.0, Y=0.0, Z=1.0

Boundary Conditions

The model is 1/4 symmetric. Symmetric boundary is applied to two faces of symmetry.

Boundary Condition Name/Topology

Tab

Boundary Condition Type

Setting

Sym1/Face

Symmetry/Continuity

Face of symmetry

 

Sym2/Face

Symmetry/Continuity

Face of symmetry

 

 

Results

The vectors of the magnetic flux density are shown below.

The magnetic flux originated from the magnet placed in the peripheral flows in to the center.

 

The vectors of the magnetic field are shown below.