{"id":1177,"date":"2026-04-01T09:55:00","date_gmt":"2026-04-01T00:55:00","guid":{"rendered":"https:\/\/www.muratasoftware.com\/en_wacul_new\/fwp-new-wacul\/?post_type=case&p=1177"},"modified":"2026-08-20T13:24:08","modified_gmt":"2026-08-20T04:24:08","slug":"belwather001","status":"publish","type":"case","link":"https:\/\/www.muratasoftware.com\/en\/case\/belwather001\/","title":{"rendered":"Thermal Analysis of Crucible"},"content":{"rendered":"\n
General<\/th>Thermal analysis is performed on a crucible placed in a vacuum chamber. The crucible is heated by the induction heating.<\/th><\/tr><\/thead>
Analysis Model<\/td>An analysis model is shown in Fig. 1. The model consists of a chamber, a coil, a crucible, and an object to heat.<\/td><\/tr>
Result<\/td>As the electromagnetic analysis result in Fig. 2 shows, the induced current is generated and the Joule loss occurs.
Fig. 3 shows a dialog box for result import. The loss density is used for a fluid-thermal analysis.
The crucible and the object to heat are heated as shown in the result of fluid-thermal analysis (Fig. 4).
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*In the vacuum chamber, convection does not occur. However in this example, the fluid is set as air to show how the convection heats the air.
*The loss density is obtained as a result of electric analysis, magnetic analysis, and electromagnetic analysis. It can be flexibly used for a fluid-thermal analysis.<\/td><\/tr>
Keywords<\/td>Crucible,Semiconductor Equipment,Coil<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n
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Fig. 1: Analysis Model<\/p>\n\n\n\n

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Fig. 2: Result of Electromagnetic Analysis<\/p>\n\n\n\n

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Fig. 3: Result Import<\/p>\n\n\n\n

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Fig. 4: Result of Fluid Analysis<\/p>\n\n\n\n

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