| General | Thermal analysis is performed on a crucible placed in a vacuum chamber. The crucible is heated by the induction heating. |
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| Analysis Model | An analysis model is shown in Fig. 1. The model consists of a chamber, a coil, a crucible, and an object to heat. |
| Result | As the electromagnetic analysis result in Fig. 2 shows, the induced current is generated and the Joule loss occurs. Fig. 3 shows a dialog box for result import. The loss density is used for a fluid-thermal analysis. The crucible and the object to heat are heated as shown in the result of fluid-thermal analysis (Fig. 4). *In the vacuum chamber, convection does not occur. However in this example, the fluid is set as air to show how the convection heats the air. *The loss density is obtained as a result of electric analysis, magnetic analysis, and electromagnetic analysis. It can be flexibly used for a fluid-thermal analysis. |
| Keywords | Crucible,Semiconductor Equipment,Coil |
Fig. 1: Analysis Model
Fig. 2: Result of Electromagnetic Analysis
Fig. 3: Result Import
Fig. 4: Result of Fluid Analysis
