| General | An analysis example of three-dimensional scanner (scanning element) composed of piezoelectric elements used for observing small areas such as SEM and AFM is shown. |
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| Analysis Model | Detection electrodes for the X, Y and Z directions are attached to the side of the cylindrical piezoelectric element, and the position is controlled by monitoring the voltage generated on the electrodes according to the load. |
| Keywords | 3D Scanners, Piezoelectric Sensors, Position Detection, Load Detection, Position Control, Measurement Systems |
